Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study Journal article
Tiron Raluca, Chevalier Xavier, Couderc Christophe, Pradelles Jonathan, Bustos Jessy, Pain Laurent, Navarro Christophe, Magnet Stéphanie, Fleury Guillaume, Hadziioannou Georges
Journal title: Journal of Vacuum Science and Technology, Volume(s): 29, Issue(s): 6, Page(s): Art Nb: 06F206 10.1116/1.3659714 (2011)