
Hyperbranched Polymers for Photolithographic Applications - Towards Understanding the Relationship between Chemical Structure of Polymer Resin and Lithographic Performances Journal article
Chochos Christos L., Ismailova Esma, Brochon Cyril, Leclerc Nicolas, Tiron Raluca, Sourd Claire, Bandelier Philippe, Foucher Johann, Ridaoui Hassan, Dirani Ali, Soppera Olivier, Perret Damien, Brault Christophe, Serra Christophe, Hadziioannou Georges
Journal title: Advanced Materials, Volume(s): 21, Issue(s): 10-11, Page(s): 1121-1125 10.1002/adma.200801715 (2009)